Semiconductor differential pressure transducer

Details Semiconductor differential pressure transducer Semiconductor differential pressure transducer

1984-05-03

1985-10-15

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73706, 73721, G01L 708, G01L 900

Patent

active

045466530

ABSTRACT:
A semiconductor differential pressure transducer comprises a pair of pressure receiving chambers at both sides of a pressure receiving part, and a pair of compensating chambers and a pair of pressure measuring chambers which are placed in the pressure receiving part, and the pressure receiving chambers communicate with the pressure measuring chambers through the compensating chambers.

REFERENCES:
patent: 4028945 (1977-06-01), Bergamini
patent: 4135408 (1979-01-01), DiGiovanni
patent: 4342231 (1982-08-01), Yamamoto et al.
patent: 4364276 (1982-12-01), Shimazoe et al.

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