Protective gas shield for chemical vapor deposition apparatus

Details Protective gas shield for chemical vapor deposition apparatus Protective gas shield for chemical vapor deposition apparatus

1997-11-24

1999-08-31

Bueker, Richard

Coating apparatus

Gas or vapor deposition

C23C 1600

Patent

active

059449004

ABSTRACT:
A shield assembly for protecting an exposed surface of an injector. The shield assembly includes a shield body having a front and back walls and at least one plenum therebetween, and at least one conduit coupled for delivering a gaseous substance to the plenum. The front wall includes a plurality of apertures for removing the gaseous substance from the plenum. The apertures are configured to provide a substantially uniform distribution of the gaseous substance across an exterior region of the front wall. At least one support member extends between the front and back walls, and is positioned to transfer forces from the front wall to the back wall to thereby reinforce the front wall against collapse.

REFERENCES:
patent: 4834020 (1989-05-01), Bartholomew et al.
patent: 5122391 (1992-06-01), Mayer
patent: 5136975 (1992-08-01), Bartholomew et al.
WJ-TEOS999 APCVD System.

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