Thermal head and method for manufacture thereof

Details Thermal head and method for manufacture thereof Thermal head and method for manufacture thereof

1985-10-23

1987-11-24

Evans, Arthur G.

Recorders

Thermal recording

219543, G01D 1510

Patent

active

047092432

ABSTRACT:
A thermal head having a heat-generating resistor layer, a power feeding conductor layer, and a protective layer superposed on an electrically insulating layer, acquires improved quality by forming the heat-generating resistor layer with an alloy consisting of tantalum, a high-melting metal, and nitrogen. The thermal head of improved quality is produced by spattering a composite target consisting of tantalum and the high-melting metal in a mixed gas consisting of nitrogen and argon.
The high-melting metal is at least one member selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, chromium, molybdenum, and tungsten.

REFERENCES:
patent: 4232213 (1980-11-01), Taguchi et al.
Materials Handbook by Brady, Aug. 2, 1966, p. 677.

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