Laser interferometric measuring machine

Details Laser interferometric measuring machine Laser interferometric measuring machine

1993-06-07

1994-04-19

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, G01B 902

Patent

active

053050886

ABSTRACT:
The invention provides a laser interferometric measuring apparatus in which there is provided a corner-cube prism which includs a reflecting surface for selectively reflecting or transmitting a beam in accordance with the polarization condition of the beam and a transmitting surface for sending out a beam. A light source, a movable mirror, a fixed mirror, a detector and the corner-cube prism so arranged that the corner-cube prism receives a reference beam and a measuring beam from the light source through the reflecting surface, sends out the reference beam to the fixed mirror and the measuring beam to the movable mirror respectively through the transmitting surface, receives the reflected reference beam from the fixed mirror and the reflected measuring beam from the movable mirror through the transmitting surface and selectively sends out the reflected reference beam and the reflected measuring beam to the detector in accordance with their polarization condition through the reflecting surface.

REFERENCES:
patent: 3454340 (1969-07-01), Nomarski
patent: 4802764 (1989-02-01), Young et al.

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