Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1993-06-11
1995-07-18
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
356400, G01N 2186
Patent
active
054344255
ABSTRACT:
An optical position detecting apparatus detects a position level and inclination of a surface of an object to be detected without the need to increase the working distance of an objective optical system. The apparatus includes an objective optical system having a lens arranged to face the surface, an illuminating optical system for supplying a position detecting light beam from the periphery of the objective optical system, a photodetector for generating an electric output corresponding to a light beam received, a condenser optical system for converging a reflected light beam from the surface illumunated with the incident light beam from the illuminating optical system onto a photosensing surface of the photodetector, and a beam directing optical element for directing at least one of the incident light beam and the reflected light beam into an optical path passing through the lens.
REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 5008705 (1991-04-01), Sindledecker
patent: 5048967 (1991-09-01), Suzuki et al.
patent: 5053628 (1991-10-01), Yamamoto et al.
patent: 5124562 (1992-06-01), Kawashima et al.
patent: 5268744 (1993-12-01), Mori et al.
Nelms David C.
Nichols Steven L.
Nikon Corporation
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