Manufacturing diamond electronic devices

Details Manufacturing diamond electronic devices Manufacturing diamond electronic devices

1989-05-24

1992-05-19

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437229, 437944, 1566591, 148DIG100, H01L 21283, H01L 21336

Patent

active

051148714

ABSTRACT:
The invention provides a process for manufacturing an electronic device on a semiconducting substrate which is transparent to light of a particular wavelength. The process includes the steps of treating the substrate to form at least one region having a different electrical property to the substrate, and defining a conducting contact for the region by selective photolithographic masking and chemical etching. A layer of photoresist material deposited on one side of the substrate is subjected to light transmitted through the substrate from a light source on the other side of the substrate. The process can be used to produce a field effect transistor on a diamond substrate.

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Ghandhi, VLSI Fabrication Principles, John Wiley and Sons,1983, pp. 476-477 and 556-560.

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