Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1990-06-26
1992-05-19
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 451, 4272481, 427314, 4273981, B05D 306
Patent
active
051147700
ABSTRACT:
A method for continuously forming a functional deposited film with a large area according to a microwave plasma CVD process is described. The method comprises the steps of continuously traveling a band-shaped member containing a conductive member along its length during which a pillar-shaped film-forming space capable of being kept substantially in vacuum therein is established by the use of the traveling band-shaped member as a side wall for the film-forming space, charging starting gases for film formation through a gas feed means into the film-forming space, and simultaneously radiating a microwave through a microwave antenna in all directions vertical to the direction of movement of the microwave so that microwave power is supplied to the film-forming space to initiate a plasma in the space whereby the film is deposited on the surface of the continuously traveling band-shaped member which constitutes the side wall exposed to the plasma. An apparatus for carrying out the method is also described.
Echizen Hiroshi
Fujioka Yasushi
Kanai Masahiro
Kariya Toshimitsu
Matsuyama Jinsho
Canon Kabushiki Kaisha
Pianalto Bernard
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