Integrated optical apparatus for the interferometric measurement

Details Integrated optical apparatus for the interferometric measurement Integrated optical apparatus for the interferometric measurement

1992-11-12

1994-05-10

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356358, 356 45, 385 14, 385129, 385131, G01B 902

Patent

active

053112792

ABSTRACT:
Apparatus for measurement of light waves with an unbalanced optical interferometer. The apparatus consists of waveguides on a flat substrate material characterized by direction-dependent thermal expansion. Thermal compensation is achieved without active regulation by a predetermined spatial arrangement and length ratio of the light paths so that the optical lengths of the two waveguides change by precisely the same amount. As a result, the optical path difference is independent of temperature changes.

REFERENCES:
patent: 4515430 (1985-05-01), Johnson
patent: 4753529 (1988-06-01), Layton
patent: 4865453 (1989-09-01), Gidon et al.
patent: 4923594 (1990-07-01), Pavlath

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