Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1993-02-08

1994-05-10

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2772, G03B 2742

Patent

active

053112490

ABSTRACT:
A projection exposure apparatus includes a light source, a condenser lens for illuminating an illumination light emanating from the light source onto a mask on which a circuit pattern has been formed, a projection lens for condensing the illumination light which has passed through the mask onto a surface of a wafer, and an aperture member disposed between the light source and the condenser lens and having both a transmission area for shaping the light emanating from the light source and a light blocking area formed at a central portion of the transmission area. An outer diameter of the transmission area of the aperture member is set such that a ratio .sigma. of an outer diameter of an effective light source to a diameter of a pupil of the projection lens is 0.6.+-.0.3, while a light blocking rate of the light blocking area is set to 60.+-.35%.

REFERENCES:
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5251067 (1993-10-01), Kamon
patent: 5253040 (1993-10-01), Kamon et al.

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