Polymerizable film and pattern forming method by use thereof

Details Polymerizable film and pattern forming method by use thereof Polymerizable film and pattern forming method by use thereof

1987-03-26

1989-01-17

Morgenstern, Norman

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 541, 430270, 430281, B05D 306, G03C 176, G03C 171

Patent

active

047987405

ABSTRACT:
A polymerizable film is provided which comprises a transition metal and a polymerizable compound, and having a solubility in a solvent which changes through a maximum and a minimum repeatedly with an increase in energy imparted for polymerization. The polymerized film may comprise a polymerizable compound represented by the formula:

REFERENCES:
patent: 4531809 (1985-07-01), Carter et al.
patent: 4539061 (1985-09-01), Sagiv
patent: 4554076 (1985-11-01), Speaker
patent: 4562141 (1985-12-01), Tieke
patent: 4693915 (1987-09-01), Matsuda et al.

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