Surface examining apparatus for detecting the presence of foreig

Details Surface examining apparatus for detecting the presence of foreig Surface examining apparatus for detecting the presence of foreig

1989-09-12

1991-05-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356431, G01N 2188

Patent

active

050177982

ABSTRACT:
An apparatus usable with an object having surfaces, for examining the states of the surfaces, includes on irradiating system for irradiating the surfaces of the object with a single light beam, and a plurality of light-receiving systems provided in association with the surfaces of the object, respectively, the plural light-receiving systems being arranged to receive light scatteringly reflected from the surfaces of the object, respectively, and to produce outputs corresponding to the states of the surfaces of the object, respectively.

REFERENCES:
patent: 3814946 (1974-06-01), Takahashi et al.
patent: 4460273 (1984-07-01), Koizumi et al.
patent: 4568835 (1986-02-01), Imamura et al.
patent: 4610541 (1986-09-01), Tanimoto et al.

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