Position detecting device utilizing selective outputs of the pho

Details Position detecting device utilizing selective outputs of the pho Position detecting device utilizing selective outputs of the pho

1985-03-04

1987-05-05

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250557, 356401, G01N 2186, G01V 904

Patent

active

046635343

ABSTRACT:
A position detecting device including a photodetector having a plurality of light-receiving sections. For the position detection, an appropriate one or ones of the light-receiving sections are selectable, whereby an alignment accuracy and an alignment speed relative to two objects having alignment marks.

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patent: 4402610 (1983-09-01), Lacombat
patent: 4515481 (1985-05-01), Yamada et al.
patent: 4553845 (1985-11-01), Kuroki et al.
patent: 4563094 (1986-01-01), Yamada

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