High voltage lateral MOS structure with depleted top gate region

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357 238, 357 35, H01L 2980

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active

048231738

ABSTRACT:
The present invention provides an improved lateral drift region for both bipolar and MOS devices where improved breakdown voltage and low ON resistance are desired. A top gate of the same conductivity type as the device region with which it is associated is provided along the surface of the substrate and overlying the lateral drift region. In an MOS device, the extremity of the lateral drift region curves up to the substrate surface beyond the extremity of the top gate to thereby provide contact between the JFET channel and the MOS channel.

REFERENCES:
patent: 4270137 (1981-05-01), Coe
patent: 4300150 (1981-11-01), Colak
patent: 4344080 (1982-08-01), Tihanyi
patent: 4394674 (1983-07-01), Sakuma et al.
patent: 4409606 (1983-10-01), Wagenaar et al.
patent: 4422089 (1983-12-01), Vaes et al.
patent: 4485392 (1984-11-01), Singer
H. Vaes et al., "High-Voltage, High Current Lateral Devices", 1980 IEDM Conf. Proc., Dec. 8-10, 1980, pp. 87-90.

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