Electric heating – Metal heating – By arc
Patent
1988-07-08
1989-04-18
Albritton, C. L.
Electric heating
Metal heating
By arc
21912180, 21912174, B23K 2600
Patent
active
048229750
ABSTRACT:
A method and an apparatus for scanning exposure, with a pulsed laser beam. A pattern of a first member is irradiated by the pulsed laser beam and the pattern of the first member is projected onto a second member. During the pattern projection the first and second members are moved in a predeterminedly synchronized relation, while the irradiation or pulse emission and the movement of the first and second members are co-ordinate with each other, whereby a uniform or substantially uniform amount of exposure is ensured on the second member. In one preferred form, a relationship V=LN is satisfied, wherein V is the speed of scanning movement of the first and second objects or the moving speed of the first object, L is the spacing between two positions in the scan direction corresponding to the intensity level portions which are approximately equal to a half of the maximum level of the intensity distribution of each pulse, and N is the number of repetition of pulse emission per one second.
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Albritton C. L.
Canon Kabushiki Kaisha
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