Process for the manufacture of semiconductor layers on semicondu

Fishing – trapping – and vermin destroying

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148DIG71, 204DIG11, 2041573, 20415741, 427 531, 427 541, 427 55, 427 561, 437 18, 437 85, 437165, 437173, H01L 2120, H01L 2122

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active

047741953

ABSTRACT:
The invention relates to a process for the manufacture of semiconductor layers on semiconductor bodies or for the diffusion of impurities from compounds into semiconductor bodies, with fission products which are to be withdrawn during the process being formed. The gist of the invention is that the reactivity of certain fission products is increased by plasma excitation or by the supplying of photons. In particular, active hydrogen is made available for entry into a highly volatile, gaseous combination with existing fission products.

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