Multi-wavelength optical drive/sense readout for resonant micros

Details Multi-wavelength optical drive/sense readout for resonant micros Multi-wavelength optical drive/sense readout for resonant micros

1997-01-17

1998-12-01

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25022719, 385 46, G01J 104

Patent

active

058442367

ABSTRACT:
A method of driving and sensing a resonant sensor network wherein a least a one resonant sensor is driven by a first light from a first light source at a first frequency, wherein said first light source is modulated by an a.c. source. A second light source at a second frequency is utilized sense the resonant frequency of the at least one resonant sensor. Wherein said at least one resonant sensor modulates said second light source. The modulated light is provided to a photo detector and the first light source is filtered out of said reflected light. The detector ac amplifies the filtered reflected light, thereby detecting said the resonant frequency of the resonant sensor.

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patent: 5559358 (1996-09-01), Burns et al.
M.Wilson, D.Burns, J.Zook, "An Optical Network of Silicon Micromachined Sensors," Proceedings of SPIEE, vol. 2687, pp. 78-88, Jan. 30, 1996.
T.Kvisteroy, O.Henrik Gusland, B. Stark, H. Nakstad, M. Eriksrud, B.Bjornstad, "Optically Excited Silicon Sensor for Permanently Installed Downhole Pressure Monitoring Applications," Sensors and Actuators, A31, pp. 164-167, 1992.
D.W.Burns, W.R.Herb, J.D.Zook, M.L. Wilson, "Optically Driven Resonant Microbeam Temperature Sensors for Fiber Optic Networks," Solid-State Actuator Workshop, Jun. 2, 1996.
M.Wilson, D.Burns, J.D.Zook, "Distributed Micromachined Sensor Network," Proceedings of SPIEE, vol. 3077, pp. 92-98, Feb. 13, 1997.

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