Semiconductor transducer or actuator utilizing corrugated suppor

Details Semiconductor transducer or actuator utilizing corrugated suppor Semiconductor transducer or actuator utilizing corrugated suppor

1991-08-30

1993-01-05

Mintel, William

Measuring and testing

Fluid pressure gauge

Diaphragm

251 611, 200 83N, 200 83V, 307117, 338 4, 257419, H01L 2966

Patent

active

051775794

ABSTRACT:
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.

REFERENCES:
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4467656 (1984-08-01), Mallon et al.
patent: 4543457 (1985-09-01), Petersen et al.
patent: 4902861 (1990-02-01), Cook
patent: 5028749 (1991-07-01), Hodate
Bean, "Anisotropic Etching of Silicon," IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978, pp. 1185-1193.

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