Installation for detecting a leak of tracer gas, and a method of

Measuring and testing – With fluid pressure – Leakage

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G01M 320

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active

047732563

ABSTRACT:
An installation for detecting a leak of a tracer gas, the installation comprises a mechanical primary pump (5) whose inlet is connected firstly to a part (9) under test via a first valve (2), and secondly to the outlet (17) of a turbo-molecular secondary pump (7) via a second valve (3), with the inlet of said turbomolecular pump being connected to the part under test via a third valve (4), and with a spectrometer cell (1) being also connected to the inlet side of said turbomolecular pump. The installation includes the improvement whereby said turbomolecular pump is constituted by two stages in series, with the connection between the two stages having an intermediate inlet orifice (16) connected thereto and also connected to the part under test (9) via a fourth valve (12), with the first stage connected to the spectrometer cell (1) having a high helium compression ratio, and with the second stage connected to the primary pump (5) having a high nitrogen throughput.

REFERENCES:
patent: 4365158 (1982-12-01), Tallon
patent: 4436998 (1984-03-01), Tallon
patent: 4472962 (1984-09-01), Mennenga
patent: 4487058 (1984-12-01), Mennenga
patent: 4510792 (1985-04-01), Morel et al.
patent: 4606221 (1986-08-01), Tallon et al.
patent: 4608866 (1986-09-01), Bergquist
patent: 4683749 (1987-08-01), Thurlow et al.
patent: 4735084 (1988-04-01), Fuzzetti

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