Three element grating objective and grating-beam shaper, and opt

Details Three element grating objective and grating-beam shaper, and opt Three element grating objective and grating-beam shaper, and opt

Filed on

1990-08-17

Date issued

1991-11-26

Examiner

Ben, Loha

Patent Class

Optical: systems and elements

SubClass

Diffraction

SubSubClass

From grating

Other Related Categories

359572, 359209, 250237G, G02B 518

Type

Patent

Status

active

Patent number

050687514

Description

ABSTRACT:
A grating objective comprises at least three gratings and in which an axial ray and a border ray of a radiation beam are interchanged at least two times so that the objective has a wavelength-independent behavior, a relatively large image field and a satifactorily uniform intensity distribution. A beam shaper and a grating objective with a built-in beam shaper are described based on the same principle.

REFERENCES:
patent: 4023033 (1977-05-01), Bricot et al.
patent: 4091281 (1978-05-01), Willhelm et al.
patent: 4771411 (1988-09-01), Greve
patent: 4986641 (1991-01-01), Bratt

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