Method for formation of a trench accessible cold-cathode field e

Details Method for formation of a trench accessible cold-cathode field e Method for formation of a trench accessible cold-cathode field e

1992-09-11

1994-12-20

Hjerpe, Richard

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

445 51, H01J 130

Patent

active

053748689

ABSTRACT:
A field emitter structure is formed, having trench accessible cold cathode tips is fabricated by forming trenches in a substrate. The trenches are subsequently filled with a conformal insulating layer, a highly conductive layer, and a polysilicon layer. The layers are etched to form emitter tips which are disposed contiguous with the trenches. Electrical signals are propagated through the trenches permitting increased performance of the emitter structure.

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