Method for forming a BiCDMOS

Details Method for forming a BiCDMOS Method for forming a BiCDMOS

1993-03-05

1994-12-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 40, 437 55, 437 59, 437 57, 437151, 148DIG9, H01L 21265

Patent

active

053745698

ABSTRACT:
A process is disclosed which simultaneously forms high quality complementary bipolar transistors, relatively high voltage CMOS transistors, relatively low voltage CMOS transistors, DMOS transistors, zener diodes and thin-film resistors, or any desired combination of these, all on the same integrated circuit chip. The process uses a small number of masking steps, forms high performance transistor structures, and results in a high yield of functioning die. Isolation structures, bipolar transistor structures, CMOS transistor structures, DMOS transistor structures, zener diode structures, and thin-film resistor structures are also disclosed.

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