Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1989-04-06
1991-11-26
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250225, 356356, G01B 902
Patent
active
050678132
ABSTRACT:
Disclosed is an optical apparatus which can be used for measuring displacement of an object. The apparatus includes an optical system for forming a linearly polarized beam whose polarization direction changes, a reflecting surface for reflecting the beam and for directing the beam in a predetermined direction, a photoelectric converter for photoelectrically converting a reflected beam directed in the predetermined direction, a polarizing device, arranged in an optical path of the reflected beam, for directing only a P-polarized beam or an S-polarized beam of the reflected beam toward the photoelectric converter.
REFERENCES:
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4829342 (1989-05-01), Nishimura
Ishii Satoshi
Ishizuka Kou
Nishimura Tetsuharu
Tsukiji Masaaki
Canon Kabushiki Kaisha
Koren Matthew W.
Willis Davis L.
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