System using induced current for contactless testing of wiring n

Details System using induced current for contactless testing of wiring n System using induced current for contactless testing of wiring n

1993-03-25

1995-04-04

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324501, 250310, G01R 3126

Patent

active

054041104

ABSTRACT:
A method for measuring electrical characteristics of an electrical device having a conductive structure associated therewith involves the sequence of steps as follows: First, employ a low energy electron beam to charge all conductors on the surface of the device. Expose individual conductors to a focussed low energy electron beam serially. Make measurements of an induced current signal when individual conductors are exposed to the focussed electron beam. Analyze induced current measurements derived from the individual conductors. Then determine electrical characteristics of the device based on the analysis. A charge storage method and three capacitive test methods for defect detection and methods for shorts delineation are described.

REFERENCES:
patent: 3315157 (1967-04-01), Watanabe et al.
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4573008 (1986-02-01), Lischke
patent: 4721855 (1988-01-01), Fazekas
patent: 4803430 (1989-02-01), Shinada et al.
patent: 4829243 (1989-05-01), Woodard, Sr. et al.
patent: 4843312 (1989-06-01), Hartman et al.
patent: 4843330 (1989-06-01), Golladay et al.
patent: 4887031 (1989-12-01), Brust
patent: 4943769 (1990-07-01), Golladay et al.
patent: 4970461 (1990-11-01), LePage
patent: 4996659 (1991-02-01), Yamaguchi et al.
patent: 5017863 (1991-05-01), Mellitz
patent: 5030908 (1991-07-01), Miyoshi et al.
patent: 5057773 (1991-10-01), Golladay et al.
patent: 5097204 (1992-03-01), Yoshizawa et al.
patent: 5124660 (1992-06-01), Cilingiroglu
patent: 5128545 (1992-07-01), Komi
Proc. Xlth Int. Cong. on Electron Microscopy, Kyoto, Jan. 1986, Pfeiffer, et al., "A Practical E-Beam System for High Speed Continuity Testing of Conductor Networks", pp. 185-188.
IBM Technical Disclosure Bulletin, vol. 24, No. 11A, Apr. 1982, Chang, et al. "Tri-Potential Method for Testing Electrical Opens and Shorts in Multilayer Ceramic Packaging Modules", pp. 5388-5390.
Microelectronic Engineering 12, pp. 253-258 (Dec. 1990), Brunner, et al., "CAD-Based Electron-Beam Testing of Micropackaging Boards".
Microelectronic Engineering 8, pp. 25-34 (Aug. 1988), Brunner et al., "Bare-Board E-Beam Testing: The Charge Storage Problem".
IBM Journal of Research and Development, vol. 34, No. 2/3, Mar./May 1990, Golladay, et al., "Electron-Beam Technology for Open/Short Testing of Multi-Chip Substrates", pp. 250-259.
Journal of Applied Physics, vol. 45, No. 2, Feb. 1974, Chung, et al., "Simple Calculation of Energy Distribution of Low-Energy Secondary Electrons Emitted from Metals Under Electron Bombardment", pp. 707-709.
Microelectronic Engineering 12, pp. 97-104 (Dec. 1990), Golladay, "A Voltage Contrast Detector for Electrical Testing of Multi-Chip Substrates".
Journal of Vacuum Science & Technology, B 9 (4), Jul./Aug. 1991, Lee, et al., "Surface Grid Technique for Noncontact E-Beam Testing of Very Large Scale Integrated Package Substrate", pp. 1993-2005.

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