Methods for manufacturing a storage electrode of DRAM cells

Details Methods for manufacturing a storage electrode of DRAM cells Methods for manufacturing a storage electrode of DRAM cells

1992-12-30

1995-04-04

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 60, 437919, H01L 27108

Patent

active

054037670

ABSTRACT:
A method for manufacturing a storage electrode of DRAM cells having a higher degree of integration in which the space between neighboring storage electrodes is made narrower than that obtainable by conventional lithographic techniques. The storage electrode is formed with a cylindrical, dual cylindrical, or jar-shaped structure to obtain a large surface area, and thus a high-capacitance.

REFERENCES:
patent: 5084405 (1992-01-01), Fazan et al.
patent: 5185282 (1993-02-01), Lee et al.
patent: 5266512 (1993-11-01), Kirsch

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