Method for manufacturing a pyrodetector apparatus

Details Method for manufacturing a pyrodetector apparatus Method for manufacturing a pyrodetector apparatus

1994-05-13

1995-04-04

Fourson, George

Fishing, trapping, and vermin destroying

2041293, 2503383, 257467, H01L 21306, H01L 2176

Patent

active

054037522

ABSTRACT:
A method for manufacturing a pyrodetector apparatus having hole structures produced by electrochemical etching in a first principal face of a substrate of n-doped, monocrystalline silicon, so that a structured region arises in the substrate. At least one pyrodetector element is arranged on the first principal face above the structured region.

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