Stabilizing apparatus for a dry etcher system

Details Stabilizing apparatus for a dry etcher system Stabilizing apparatus for a dry etcher system

1997-11-06

1999-12-28

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

31511121, H05H 100

Patent

active

060076747

ABSTRACT:
The present invention discloses a stabilizing apparatus for avoiding auto-resetting of a dry etcher system. The ripples of direct current are eliminated by applying capacitors connects across the testing points of the power supply. Auto-reset caused by the power supply is overcome to support a more stable electric power for the hard disk driver of the dry etcher system.

REFERENCES:
patent: 5025135 (1991-06-01), Gesche et al.

Affiliated with

Also associated with

Rating

Stabilizing apparatus for a dry etcher system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stabilizing apparatus for a dry etcher system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stabilizing apparatus for a dry etcher system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2379928