Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Patent
1993-02-03
1994-06-28
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
356400, G06K 7015
Patent
active
053249534
ABSTRACT:
A novel exposure system includes a reduced-projection lens optimized for a predetermined single exposure wavelength and a chromatic aberration correction system for TTL (Through The Lens) alignment with broadband light. The correction system includes a holographic lens which dispersion has a negative number in contrast to a conventional glass lens which has a positive dispersion number. By employing a holographic lens, the total optical length of an alignment system can be made short enough to avoid the necessity of installing a mirror therein, thus realizing a highly accurate alignment system.
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Thomas Stone et al.; Hybrid diffractive-refractive lenses and achromats; Applied Optics; vol. 27; No. 14; Jul. 15, 1988; pp. 2960-2971.
Dean Faklis et al.; Broadband imaging with holographic lenses; Optical Engineering; vol. 28; No. 6; Jun. 1989; pp. 592-598.
Nakayama Yasuhiko
Oshida Yoshitada
Shiba Masataka
Yoshitake Yasuhiro
Hitachi , Ltd.
Le Que T.
Nelms David C.
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