Method of making a 3-dimensional programmable antifuse for integ

Fishing – trapping – and vermin destroying

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437 60, 437922, H01L 2170, H01L 2700

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active

053246810

ABSTRACT:
The invention is directed to a concept to use a 3-dimensional DRAM capacitor as a one-time non-volatile programming element (programmable antifuse) to make redundancy repair and/or to select other options on a DRAM. The programmable element of the present invention provides some significant advantages, such as a lower programming voltage, which allows use of the DRAM's existing operating supply, and requiring only half of the operating voltage to test the element once programming is accomplished. The lower programming voltage allows for redundancy repair of defective DRAM cells (or selecting other options) to be made after the DRAM die is packaged including after it is installed at a customer's site.

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