Piezoelectric actuator

Details Piezoelectric actuator Piezoelectric actuator

1994-06-08

1996-01-02

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310369, H01L 4108

Patent

active

054811520

ABSTRACT:
Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage includes a hollow body having a volume filled with an incompressible liquid, an elastic membrane closing an opening formed in the hollow body, and a device for controlling the piezoelectric element so as to vary the volume of the hollow body during a deformation of the elastic membrane caused by the incompressible liquid.

REFERENCES:
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patent: 3215078 (1965-11-01), Stec
patent: 3719939 (1973-03-01), Geil et al.
patent: 4011474 (1977-03-01), O'Neill
patent: 4499479 (1985-02-01), Chee-Shuen Lee et al.
patent: 4519751 (1985-05-01), Beckman et al.
patent: 4525645 (1985-06-01), Shirley et al.
patent: 4586018 (1986-04-01), Bettman
patent: 4917579 (1990-04-01), Torma
patent: 4957136 (1990-09-01), Gavrila
patent: 4996675 (1991-02-01), Beauducel
patent: 5103130 (1992-04-01), Rolt et al.
patent: 5199004 (1993-03-01), Monahan

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