Vertically layered MOMOM tunnel device

Details Vertically layered MOMOM tunnel device Vertically layered MOMOM tunnel device

1984-12-19

1987-02-10

Edlow, Martin H.

357 30, 357 4, 357 55, 357 56, H01L 4902, H01L 2714

Patent

active

046426655

ABSTRACT:
MOMOM structural geometry and fabrication techniques are disclosed. First and second metal layer strips (6 and 10) are supported on an insulating substrate (4) and have vertically overlapped portions sandwiched between insulating layers (8, 12). A generally vertical side (18) is defined through the layers to the substrate to expose vertical edges (20, 24) of the metal layers which are oxidized (32, 34) and covered by a third metal layer (44) extending therebetween. In the preferred embodiment, the middle insulating layer (8) is undercut (28), oxidized (36, 40), and filled with metallization (50), to provide a vertical rectilinear conduction path.

REFERENCES:
patent: 3500142 (1970-03-01), Kahng

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