Method and apparatus for producing repeatable motion from biased

Details Method and apparatus for producing repeatable motion from biased Method and apparatus for producing repeatable motion from biased

1994-09-28

1996-10-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

318116, 310317, H01L 4108

Patent

active

055680038

ABSTRACT:
A method and apparatus for producing a repeatable motion profile from a biased piezoelectric transducer (28) in which a first set of stored calibration voltage values corresponding to points in a predetermined voltage profile on the transducer (28) are retrievably accessed from a random access memory (20) by sequentially addressing (30,32,34) the memory (20) in order to drive the piezoelectric transducer (28) with the retrievably accessed calibration voltage values. Gain current values associated with motion of the piezoelectric transducer (28) at the same measurement points on the voltage profile associated with the stored values are measured (48,50,52) and compared against the stored calibration values and any differences are corrected for in order to produce the repeatable motion profile. The measurement points are preferably in a region of constant rate of change of voltage in the voltage profile, such as corresponding to the crossover point (54) in a motion profile of linear slope.

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Seung-Bae Jung and Seung-Woo Kim, "Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control," Precision Engineering, vol. 16 No. 1, pp. 50-55, Jan. 1994.

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