Method and apparatus for enhancing optical photoplotter accuracy

Details Method and apparatus for enhancing optical photoplotter accuracy Method and apparatus for enhancing optical photoplotter accuracy

1988-01-11

1989-07-25

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

354 4, 356358, G03B 4100

Patent

active

048516562

ABSTRACT:
A novel method and apparatus for improving the overall accuracy and repeatability of an optical photoplotter which is characterized by a controller which determines an image position error from interferometric feedback signals and position command signals and subsequently provides displacement of the image in dependence thereon.

REFERENCES:
patent: 4500182 (1985-02-01), Schumann
patent: 4589746 (1986-05-01), Pavone

Affiliated with

Also associated with

Rating

Method and apparatus for enhancing optical photoplotter accuracy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for enhancing optical photoplotter accuracy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for enhancing optical photoplotter accuracy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2360041