Semiconductor device responsive to ions

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage

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357 6, 357 231, 357 237, 357 55, 324 715, 204 1T, 204416, 204418, H01L 4902, H01L 2978, H01L 2966, H01L 2906

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046368272

ABSTRACT:
A device comprising a field effect transistor having a floating gate 20 formed on a first surface of a substrate 10 over gate oxide 13a and source and drain regions 11, 12. A responsive layer 15 is provided on the second surface of the substrate and is capacitatively coupled to the floating gate via a thin insulating membrane 13b at a location away from the transistor. The device is applicable in the biomedical domain.

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M. A. Afromowitz et al., "Fabrication of pH-Sensitive Implantable Electrode by Thick Film Hybrid Technology", Journal of Bioengineering, vol. 1 (1977), pp. 55-60.
M. Esashi et al., "Integrated Micro Multi Ion Sensor Using Field Effect of Semiconductor", IEEE Transactions on Biomedical Engineering, vol. BME-25 (1978), pp. 184-192.
J. N. Zemel, "Chemically Sensitive Semiconductor Devices", Research/Development vol. 28 (1977), pp. 38-44.

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