Spin-on-glass planarization by a new stagnant coating method

Details Spin-on-glass planarization by a new stagnant coating method Spin-on-glass planarization by a new stagnant coating method

1995-09-13

1996-10-22

Kunemund, Robert

Fishing, trapping, and vermin destroying

H01L 21473

Patent

active

055676600

ABSTRACT:
An improved process to form a planar spin-on-glass layer on a semiconductor body. The process comprises forming a first dielectric layer over a conductive layer. Next, a spin-on-glass (SOG) layer is formed on the first dielectric layer. The SOG layer can be formed of a silicate or a siloxane, each having different process parameters. The SOG solute is dispensed on a stationary wafer. Then two spin cycles are applied to the wafer: a first low speed cycle is applied while the solute is being dispensed on to the wafer and a second high speed cycle. The stationary SOG dispensing and the first low speed cycle allow the solute to more readily fill in tight valleys between metal line. Moreover, the speed and timing of the low speed spin/dispensing allow the proper amount of solvent to evaporate thus increasing the SOG viscosity which improves the planarization for a given thickness of SOG. This process significantly increases the ability of the SOG to fill between closely spaced lines and form a smooth planar layer.

REFERENCES:
patent: 4822639 (1989-04-01), Fujii et al.
patent: 5094884 (1992-03-01), Hillman et al.
patent: 5238878 (1993-08-01), Shinohara
patent: 5254497 (1993-10-01), Liu
patent: 5328871 (1994-07-01), Tanigawa et al.
patent: 5371046 (1994-12-01), Liaw et al.
patent: 5382547 (1995-01-01), Sultan et al.
patent: 5395803 (1995-03-01), Adams
patent: 5405813 (1995-04-01), Rodrigues
patent: 5429990 (1995-07-01), Liu et al.
patent: 5453406 (1995-09-01), Cheu
patent: 5461010 (1995-10-01), Cheu et al.

Affiliated with

Also associated with

Rating

Spin-on-glass planarization by a new stagnant coating method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spin-on-glass planarization by a new stagnant coating method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin-on-glass planarization by a new stagnant coating method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2358589