Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1988-01-11
1989-07-25
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 34, B05D 306
Patent
active
048512540
ABSTRACT:
A device for forming a diamond film has a casing in which a vacuum is maintained to 50 Torr: a positive electrode and a negative electrode are disposed within the casing so that ends of the positive electrode and the negative electrode are opposed to each other through a space: a substrate is disposed near the space between the electrodes, a gas inlet pipe supplies a mixture gas of hydrogen, argon and methane to the space between the electrodes and an arc power supply is connected to the electrodes for supplying a predetermined arc output power thereacross to form an arc discharge column in the space therebetween. By supplying the mixture gas to the arc discharge column of which the temperature is extremely high, the mixture gas is decomposed at a high rate, and a diamond film of high purity grows on the substrate at a high speed.
REFERENCES:
patent: 4452686 (1984-06-01), Axenov
patent: 4565618 (1986-01-01), Banks
patent: 4645977 (1987-02-01), Kurokawa
patent: 4698256 (1987-10-01), Giglia
H. Vora and T. J. Moravec, "Structural Investigation of Thin Films of Diamond Like Carbon", J. Appl. Phys., 52(10), Oct., 1981, pp. 6151-6157.
Hattori Tadashi
Ito Nobuei
Uesugi Hiroshi
Yamamoto Minoru
Beck Shrive
Dang Vi Duong
Nippon Soken Inc.
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