Device for the optical measurement of the edge to edge dimension

Details Device for the optical measurement of the edge to edge dimension Device for the optical measurement of the edge to edge dimension

1984-07-26

1987-01-13

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356384, G01B 1102, G01B 1108

Patent

active

046366393

ABSTRACT:
Optical device forms a magnified image of the object to be measured. A photosensitive member constituted by a sequence of photosensitive elements is arranged in the image plane. An analog-digital converter is connected to the photosensitive member and a digital processing circuit performs a discrete Fourier transformation and determines the value N of the first minimum of the spectrum obtained or the mean variation N between minima. The sought dimension L of the object to be measured is obtained by the relation L=X/N, in which X is a parameter defined by the operating conditions.

REFERENCES:
patent: 3937580 (1976-02-01), Kasdan
patent: 4263508 (1981-04-01), Leary et al.
IBM Technical Disclosure Bulletin, vol. 20, No. 1, Jun. 1977, New York; R. S. Charsky et al.

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