Apparatus for producing a single crystal

Details Apparatus for producing a single crystal Apparatus for producing a single crystal

1996-01-26

1996-10-22

Breneman, R. Bruce

Metal deforming

117217, 117900, 373158, B01D 900

Patent

active

055673996

ABSTRACT:
Apparatus for producing a single crystal of semiconductor material in accance with the Czochralski method, has a cooling means which cools the growing single crystal and is constructed in two parts, The first is an upper part duct system through which a liquid coolant flows. The second is a lower part which is a heat-conducting cooling body.

REFERENCES:
patent: 2707719 (1956-05-01), Leibowitz
patent: 3265469 (1966-08-01), Hall
patent: 3556732 (1971-01-01), Chang et al.
patent: 4133969 (1979-01-01), Zumbrunnen
patent: 4981549 (1991-01-01), Yamashita et al.
patent: 5180562 (1993-01-01), Drechsel et al.
patent: 5264189 (1993-11-01), Yamashita et al.
patent: 5316742 (1994-05-01), Tomioka et al.
patent: 5441014 (1995-08-01), Tomika et al.
Patent Abstracts of Japan, vol. 40, No. 235 (G 366), Aug. 14, 1986.

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