Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1988-07-13
1990-05-08
Griffin, Donald A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 75, 355 76, 269 21, G03B 2742, G03B 2762, B25B 1100
Patent
active
049242580
ABSTRACT:
A mask holder and a mask conveying and holding mechanism using the same, effectively usable in an exposure apparatus for printing a pattern of a mask or reticle on a workpiece such as a semiconductor wafer or a plate-like member made of glass or cermaics, is disclosed. In one preferred form, the mask holder has three positioning rollers, two spring-biased pressing rollers for pressing two side faces of a mask so that other two side faces of the mask abut against the positioning rollers, and two spring-biased pressing members for pressing an upper face of the mask so that a lower face of the mask abuts against a lower end face of a mask accommodating portion of the holder. With this arrangement, the mask can be held as a unit with the holder during conveyance. Also, the holder and a mask stage of the exposure apparatus may be arranged so that the mask can be held on the stage by vacuum suction.
REFERENCES:
patent: 2995979 (1961-08-01), Gordon et al.
patent: 3476476 (1969-11-01), Chitayat
patent: 3497705 (1970-02-01), Adler
patent: 4544311 (1985-10-01), Husain
patent: 4583847 (1986-04-01), Battig et al.
patent: 4784377 (1988-11-01), Woodward
Canon Kabushiki Kaisha
Griffin Donald A.
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