Method of manufacturing electron-emitting device

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

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445 51, H01J 130, H01J 902

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056741006

ABSTRACT:
An electron-emitting device comprises a pair of oppositely disposed electrodes and an electroconductive film inclusive of an electron-emitting region arranged between the electrodes. The electric resistance of the electroconductive film is reduced after forming the electron-emitting region in the course of manufacturing the electron-emitting device.

REFERENCES:
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"Field-emitter array performance enhancement using hydrogen glow discharges", Appl. Phys. Lett. 63(1), pp. 33-35, P.R. Schwoebel, et al. (Jul. 5, 1993).
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H. Araki, et al., "Electroforming and Electron Emission of Carbon Thin Films," J. Vacuum Soc. of Japan, (1981) pp. 22-29.
M. Hartwell, et al., "Strong Electron Emission From Patterned Tin-Indium Oxide Thin Films," International Electron Devices Meeting (1975) pp. 519-521.
W.P. Dyke, et al. "Field Emission", Advances in Electronics and Electron Physics, vol. VIII (1956) pp. 91-185.
C.A. Mead, "Operation of Tunnel-Emission Devices", J. Appl. Physics, vol. 32 (1961) pp. 646-652.
C.A. Spindt, et al., "Physical Properties of Thin-Field Emission Cathodes with Molybdenum Cones", J. Appl. Physics, vol. 47 (1976), pp. 5248-5263.
M.I. Elinson, et al., "The Emission of Hot Electrons and the Field Emission of Electrons from Tin Oxide", Radio-Engineering and Electronic Physics, (1965) pp. 1290-1296.

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