Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1991-09-19
1992-04-14
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 38, 427 55, 427131, 427132, 4272557, 427294, B44C 110, B05D 512, H01F 1002
Patent
active
051046857
ABSTRACT:
A method of producing a magnetic recording medium has the steps of forming a ferromagnetic metallic film layer on a non-magnetic substrate, forming, by a plasma CVD process, a protective layer on the ferromagnetic metallic film layer, and forming an oxidation layer on the protective layer by a process conducted in a vacuum atmosphere. An apparatus is disclosed for carrying out this method has a plasma CVD system for forming a ferromagnetic metallic film layer on a non-magnetic substrate, a feeding device including a plurality of rollers and for feeding the substrate carrying the ferromagnetic metal film layer in a predetermined direction, a processing device disposed at a position corresponding to one of the rollers and capable of forming a protective layer on the ferromagnetic metallic film layer, and a vacuum processing device capable of forming an oxidation layer and disposed downstream of the plasma CVD system as viewed in the direction of feed of the substrate effected by the feeding device.
REFERENCES:
patent: 4900622 (1990-02-01), Nakayama et al.
Murai Mikio
Odagiri Masaru
Takahashi Kiyoshi
Matsushita Electric - Industrial Co., Ltd.
Pianalto Bernard
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