Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Patent
1989-04-20
1992-04-14
Kunemund, Robert
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
427 38, 427 39, 156DIG68, 20419215, C01B 3106
Patent
active
051046342
ABSTRACT:
A novel process is disclosed for forming diamond coatings whereby a silent discharge, such as a DC glow discharge, is used to form a plasma containing activated species. The plasma is then expanded through a nozzle to form a low temperature plasma jet which contacts a substrate to form the diamond coating. The plasma initially contains a mixture of hydrogen and carbon based gases such as methane. In a preferred embodiment, hydrogen is initially present in the plasma and the carbon containing gas (carbon containing molecules e.g. methane, carbon monoxide) is subsequently mixed into the plasma jet downstream of the nozzle throat and allowed to react with the activated hydrogen, prior to the plasma jet contacting the substrate.
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Goldberg Mark
Hercules Incorporated
Kunemund Robert
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