Method of testing a transistor

Details Method of testing a transistor Method of testing a transistor

1997-12-29

2000-04-18

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3126

Patent

active

06051986&

ABSTRACT:
A method of testing for a kink effect typically occurring during the fabrication of shallow trench isolation of a transistor in an integrated circuit. A curve of source/drain current versus gate voltage is plotted. A second order differential of the curve is performed and plotted, and the existence of a kink effect is determined by the number of the local maxima and local minima. The degree of kink effect as low as and below a 0.25 .mu.m level is determined according to the level of a global minimum value.

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patent: 4680810 (1987-07-01), Swartz
patent: 4795976 (1989-01-01), Pawlik
patent: 4979014 (1990-12-01), Heida et al.
patent: 5420055 (1995-05-01), Vu et al.
patent: 5767549 (1998-06-01), Chen et al.
patent: 5821575 (1998-10-01), Mistry et al.

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