Monolithic microchannel heatsink

Details Monolithic microchannel heatsink Monolithic microchannel heatsink

1995-05-15

1996-08-20

Scott, Jr., Leon

Coherent light generators

Particular temperature control

Heat sink

372 70, H01S 304

Patent

active

055486053

ABSTRACT:
A silicon wafer has slots sawn in it that allow diode laser bars to be mounted in contact with the silicon. Microchannels are etched into the back of the wafer to provide cooling of the diode bars. To facilitate getting the channels close to the diode bars, the channels are rotated from an angle perpendicular to the diode bars which allows increased penetration between the mounted diode bars. This invention enables the fabrication of monolithic silicon microchannel heatsinks for laser diodes. The heatsinks have low thermal resistance because of the close proximity of the microchannels to the laser diode being cooled. This allows high average power operation of two-dimensional laser diode arrays that have a high density of laser diode bars and therefore high optical power density.

REFERENCES:
patent: 4315225 (1982-02-01), Allen, Jr. et al.
patent: 4486886 (1984-12-01), Ream
patent: 4719631 (1988-01-01), Conaway
patent: 5040187 (1991-08-01), Karpinski
patent: 5099488 (1992-03-01), Ahrabi et al.
patent: 5105429 (1992-04-01), Mundinger et al.
patent: 5105430 (1992-04-01), Mundinger et al.

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