Wafer keys for wafer probe alignment

Details Wafer keys for wafer probe alignment Wafer keys for wafer probe alignment

1987-04-02

1988-07-05

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

356401, G01R 3100, G01B 1100

Patent

active

047557508

ABSTRACT:
The invention comprises a system of alignment key patterns, within the scribe lines of a semiconductor chip, which allow more accurate placement of wafer probes, and more accurate location of fuses for the purposes of blowing selected ones of those fuses by means of laser energy.

REFERENCES:
patent: 4356223 (1982-10-01), Iida et al.
patent: 4419013 (1983-12-01), Heimer
patent: 4521114 (1985-06-01), Van Peski et al.
patent: 4540277 (1985-09-01), Mayer et al.

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