Substrate detecting system with edge detection, such as wafer or

Details Substrate detecting system with edge detection, such as wafer or Substrate detecting system with edge detection, such as wafer or

1991-11-20

1993-04-27

Swann, III, Glen R.

Communications: electrical

Condition responsive indicating system

Specific condition

250224, 269903, 340540, 340568, 414DIG2, G08B 2100

Patent

active

052066274

ABSTRACT:
A plurality of light-emitting/receiving sections respectively include light-emitting sections arranged to correspond to substrates to be detected and light-receiving sections for receiving beams from the light-emitting sections. The substrates to be detected are a predetermined number of substrates arranged and accommodated at predetermined intervals in a substrate accommodating section. A moving section relatively moves the plurality of light-emitting/receiving sections and the substrates to be detected in directions cross or perpendicular to each other. A plurality of signal processing sections respectively detect changes in received light amounts caused in accordance with an output signal from each of light-receiving sections, when beams from the light-emitting sections are opposite to edge portions of the substrates to be detected while the plurality of light-emitting/receiving sections and the substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other by the moving section. A detecting section detects the presence/absence of the predetermined number of substrates to be detected which are arranged and accommodated in the substrate accommodating section in accordance with output signals from the plurality of signal processing sections.

REFERENCES:
patent: 4859993 (1989-08-01), Kagami et al.
patent: 4938655 (1990-07-01), Asano
patent: 4987407 (1991-01-01), Lee
patent: 5095300 (1992-03-01), Alexander et al.

Affiliated with

Also associated with

Rating

Substrate detecting system with edge detection, such as wafer or does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate detecting system with edge detection, such as wafer or, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate detecting system with edge detection, such as wafer or will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2330791