Apparatus for and method of cleaning objects to be processed

Details Apparatus for and method of cleaning objects to be processed Apparatus for and method of cleaning objects to be processed

1997-09-24

2000-04-18

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With heating, cooling or heat exchange means

1341023, 134200, 134902, B08B 300

Patent

active

060502754

ABSTRACT:
A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 can be insulated from a space of the cleaning bath 41 through rotary doors 59a and a slide door 72. In the cleaning method, a cleaning process in the cleaning bath 41 is carried out while sealing it by the rotary doors 59a. On the other hand, a drying process in the drying chamber 42 is accomplished while sealing and closing it by the slide door 72. Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.

REFERENCES:
patent: 4132235 (1979-01-01), Koplin et al.
patent: 4558524 (1985-12-01), Peck et al.
patent: 4694527 (1987-09-01), Yoshizawa
patent: 4983223 (1991-01-01), Gessner
patent: 5186192 (1993-02-01), Netsu et al.
patent: 5368649 (1994-11-01), Tsukazaki
patent: 5369891 (1994-12-01), Kamikawa
patent: 5443540 (1995-08-01), Kamikawa
patent: 5520744 (1996-05-01), Fujikawa et al.
patent: 5657553 (1997-08-01), Tarui et al.

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