Holographic method for generating three dimensional conformal ph

Details Holographic method for generating three dimensional conformal ph Holographic method for generating three dimensional conformal ph

1996-03-27

1998-01-06

Angebranndt, Martin

Radiation imagery chemistry: process, composition, or product th

Holographic process, composition, or product

Composition or product or process of making the same

430 1, 430 5, 430320, 359 15, G03H 116

Patent

active

057052980

ABSTRACT:
A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A holograph is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The holograph includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.

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