Process for fabricating thin films

Details Process for fabricating thin films Process for fabricating thin films

1994-12-30

1997-05-27

Utech, Benjamin

Coating processes

Spraying

427168, 427384, 4273855, 427426, B05D 700

Patent

active

056330430

ABSTRACT:
A process for producing thin films includes a step of dissolving one or two or more thin film materials into solutions or dispersions that are sprayed respective spray nozzles provided for each component onto a substrate in a high vacuum vessel. The components are deposited on the substrate and then are heated.

REFERENCES:
patent: 3378396 (1968-04-01), Zaromb
patent: 4091172 (1978-05-01), Miller
patent: 4228220 (1980-10-01), Garrison
patent: 4783340 (1988-11-01), McDonell et al.
patent: 4837046 (1989-06-01), Oishi et al.

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