Method for aligning processing areas on a substrate with a prede

Details Method for aligning processing areas on a substrate with a prede Method for aligning processing areas on a substrate with a prede

1994-04-05

1997-01-21

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

2505593, 356400, G01N 2186

Patent

active

055962041

ABSTRACT:
Measured is a coordinate position, on a static coordinate system, of each of some specified areas selected from a plurality of areas on a substrate. The coordinate positions of some specified areas undergo a weighted averaging process by use of such a weight that it decreases with a larger distance between the specified areas. The coordinate position is thereby smoothed per specified area. The weight is given to each of some smoothed coordinate positions, and, thereafter, a statistic calculation is effected. The coordinate position, on the static coordinate system, of the area on the substrate is thereby obtained. The substrate is sequentially located based on the obtained coordinate position, and each area on the substrate is thus aligned to a predetermined position.

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