Semiconductor integrated pressure transducer

Details Semiconductor integrated pressure transducer Semiconductor integrated pressure transducer

1987-09-29

1988-07-05

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73729, 73754, 200 814, 200 816, 200 83R, G01L 708, G01L 900

Patent

active

047546476

ABSTRACT:
A semiconductor integrated pressure transducer in which a semiconductor substrate incorporates a hermetically sealed system comprising a first chamber communicating with a second chamber via a capillary. The first chamber contains a fluid and has at least one portion of a wall in the form of a deformable membrane separating the atmosphere within the chamber from that external to the sensor. The second chamber contains a compressible gas and has rigid walls. The capillary is partially filled with electrically conducting liquid, and the liquid physically separates the fluid in the first chamber from the gas in the second chamber. The wall of the capillary is electrically conductive at least in two separated regions such that in use, at a predetermined external atmosphere pressure, the electrically conductive liquid makes contact with both electrically conductive regions thereby completing an electrical circuit.

REFERENCES:
patent: 3271543 (1966-09-01), Schonfeld
patent: 3727017 (1973-04-01), Schlesman
patent: 4000652 (1977-01-01), Wiklund

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